Infineon 650V CoolSiC�?MOSFETs offer an ideal response to the progressing mega trends: much more efficiency and electrical power density. CMP of single-crystal SiC was to start with noted by Zhou [22] in 1997. He observed that chemical reactions of CMP could be improved by escalating the temperature (T) as well https://www.facebook.com/permalink.php?story_fbid=pfbid08stir99oH2rMh4bAP5RVy42CBr8LGWHNVBFu4Njvg617Z3wmqBMouQR2GZ4uMLMYl&id=61562415773754&__cft__[0]=AZWCnDvvgsqqO_o8iCHMLiy9DrykKX47VhqnaOSyxrsUh37qUSJfkCnLHWe9flssG1MvQPIZrpXEJ5fwLoI7Jcrpt5UPckrlikdevCYkYFU7hPIgxIQZVB0yalfVBvnqN4P4pEokF9GmRlRMc2WQbpcEnscpyZOLx3fFdhA_AapKDxnKeuthIb5rkXLrS44XnIx81YL8PaYFflDYzUktkIt9&__tn__=%2CO%2CP-R